Купить Aligned Ion Implantation Using Scanning Probes. ISBN 9783639049213.

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A new technique for precise ion implantation has beendeveloped using a scanning probe that has beenequipped with a small aperture and incorporated intoan ion beamline. Ions are passed through the apertureand implanted into a sample. By using a scanningprobe the target can be imaged in a non-destructiveway prior to implantation. The probe can be placed atthe desired location with nanometer precision.With this approach a final placement accuracy ofabout 10 nm is envisioned, limited by.. описание на сайте интернет продавца